Diffraction Laser-Electronic Fourier Thickness Gage for Monitoring the Thickness of a Large Diameter Lens

Abstract

The methodology of synthesizing a model for a diffraction laser-optical system for measuring the thickness of large diameter lenses within the framework of engineer-graph procedures for the design, manufacture, and study of a laser-electronic Fourier thickness gage is developed. Nine stages are identified for model synthesis based on successive-parallel sorting of models when considering statement of the problem in designing a laser-electronic Fourier thickness gage. The task of creating a fundamentally new method and provisions for measuring lens thickness is solved by means of an automatic diffraction-geometric-optical method for recording the space-frequency spectrum of the measuring aperture. Schematic analysis is performed and a functional optical scheme is constructed for a two-channel diffraction laser-optical system for measuring lens thickness. A measurement procedure is developed and the Fourier thickness gage developed is studied by experiment.