Diffraction gratings in sol–gel films by direct contact printing using a UV-mercury lamp

Abstract

We report on the fabrication of diffraction gratings in photosensitive sol–gel thin films by direct contact printing using a UV-mercury lamp. Titanium amplitude masks were used to replicate diffraction gratings into photosensitive sol–gel films by contact printing with an incoherent UV-light source. Gratings with 1-μm period were fabricated in sol–gel films. The diffraction efficiencies of each diffracted order were measured and compared to theoretical values. The demonstrated process of contact printing using a regular UV-light source in the optically compatible sol–gel material has potential for large-scale fabrication of submicrometer gratings at very low cost.