Abstract
A review of diffraction analysis and compensation methods for surface acoustic wave (SAW) devices is given. The diffraction effect on different SAW devices is discussed, analyzing the two-dimensional SAW potential distribution in simulations, and measurements done with a scanning electron microscope and with a laser probe. The state-of-the-art wideband compensation method is outlined for the cases of bandpass filters and delay lines. Examples demonstrate the achieved accuracy in SAW devices. >
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