Abstract

We present an experimental comparison of gas pressure sensors based on differently structured extrinsic Fabry-Pérot interferometers (FPIs). Different fabrication techniques were adopted to foster the practical realization of these sensors. A novel photonic crystal fiber (PCF) based FPI with an angle cleaved end face that enables gas to easily flow in and out of the cavity while also avoiding the mixed signal from the cascaded structure is also presented. We measured helium gas pressure from 0.1 MPa (atmospheric pressure) to 5 MPa at room temperature and obtained a gas pressure sensitivity coefficient of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$0.5 \boldsymbol {\pm }0.01$ </tex-math></inline-formula> nm/MPa. Furthermore, the gas pressure sensitivities are numerically analyzed to validate the experimental results.

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