Abstract
The beam homogeneity and stored energy of discharge pumped excimer amplifiers are critically dependent on the prepulse level of the electric excitation pulse. Here a scheme is presented to decrease significantly the prepulse level by differential charging of the two electrodes. The modified charging circuit also enables to increase the amplitude and improve the rise time of the main pulse, thus improving the discharge quality and the amplification properties of the excimer module. The circuit is especially well suited for short-pulse KrF amplifiers.
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