Abstract
Control over material architectures is essential to the performance of photonic devices and systems. Optical isolation of the photonic materials from substrates can significantly enhance their performance but suffers from complicated fabrication processes and limited applications. Here a differential polymer chain scission strategy is proposed to fabricate free-standing photonic structures based on one-step electron-beam direct writing on polymer bilayers (EOB). The polymer molecular mass-dependent sensitivity to electron beam enables differential patterning of the two layers of polymers, leading to the direct formation of suspended optical microcavities. The EOB technique features high materials compatibility and design flexibility for the optical microcavities, which significantly expands the application scope of the suspended optical microcavities. As well as providing a versatile strategy for building high-performance photonic materials, the results provide a promising platform for innovative applications of optical microstructures.
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