Abstract
Background: It is easy to carry out a wide range of high-precision micro movement on the magnetic levitation stage which also turns to be suitable in precision manufacturing and ultra-precision measurement field. In view of the strong coupling and nonlinear characteristics of the dynamic model of the sandwich layer structure, the differential geometry soft variable structure control method is proposed. Keywords: Magnetic levitation movement stage, differential geometry, feedback linearization, soft variable structure controller, variable saturation, upside coil.
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