Abstract
The differential D( 3He, p) 4He reaction cross-section was determined at a laboratory angle of 135° for 3He energies between 0.5 and 6 MeV. Deuterium depth profiles are determined from the measurement of the proton yield as a function of incident 3He energy with following deconvolution of the obtained yield function. This allows deuterium depth profiling to very large depths. Deuterium depth profiling to a depth of 7 μm in W and 50 μm in B 4C is demonstrated. The accuracy of the method is discussed.
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