Abstract
We present experimental results and numerical simulation of electron-beam heating, melting, and evaporation of a solid dielectric (aluminum oxide ceramic) in medium vacuum (1–100 Pa). The indicated processes occurred as a result of interaction between a powerful continuous electron beam, generated by a fore-vacuum plasma-cathode electron source, and the surface of the solid ceramic target. During the interaction with the target, the electron beam ionized a part of the evaporated material, and starting from the onset of ceramic melting up to intense evaporation, the beam plasma has been containing ions of the ceramic material. We suggest an optimal choice of ceramic evaporation regime for the purpose of coating deposition.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
