Abstract
Nickel-aluminium films in the composition range up to 50 at% Al have been prepared by co-evaporation and evaporation from single alloyed sources. In the range 35–50 at% Al, surface outgrowths have been found in the co-evaporated films, but no outgrowths exist on films prepared from alloyed sources. A difference in lattice parameter between films prepared by the two deposition techniques has also been found in the same composition range. These differences can be explained if the evaporated species are not single atoms but molecules or agglomerates of NiAl, when evaporations are carried out from single alloyed sources. For alloyed sources with different melt compositions, the film compositions obtained have been compared with calculated values. Most films contain a higher AI content than predicted by theory, probably due to limited diffusion in the melt. The composition variations in depth within the films are also smaller than predicted.
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