Abstract
This letter deals with the dynamics of dielectric microparticles in alternating-current electro-osmotic micropumps, which is based on the competitive interplay of inertial, dielectrophoretic, and viscous drag forces. The electric field and the electro-osmotic flow are modeled and computed by means of finite elements and particle trajectories are evaluated taking into account the forces above. Thereby, mean traveling height and velocity depend on driving voltage and frequency, which allows for an effective type of particle manipulation and separation. The obtained particle velocities show good agreement with measured velocities of hollow glass beads in a device realized in SU8/glass technology.
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