Abstract
Three-layer epitaxial heterostructures, in which a 1000-nm-thick intermediate layer of Ba0.05Sr0.95TiO3 is integrated with strontium ruthenate conducting electrodes, have been grown by laser evaporation. Using photolithography and ion etching, film parallel-plate capacitors SrRuO3/Ba0.05Sr0.95TiO3/SrRuO3 are formed based on the grown heterostructures. A sharp maximum in the temperature dependence of the capacitor capacitance is observed at T ≈ 75 K. At T 250 K and the measuring signal frequency of 1 kHz, the dielectric loss tangent of the film capacitors increases exponentially with increasing temperature.
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