Dielectric properties of oxide structures by a laser-based direct-writing method

Abstract

Matrix-assisted pulsed laser evaporation direct-write (MAPLE-DW) is a laser-based method of directly writing mesoscopic patterns of electronic materials. Patterns of composite BaTiO3/SiO2/TiO2 dielectric material were written onto Pt/Au interdigitated-electrode test structures, with precise control over final dielectric properties. Scanning electron microscopy indicates random close-packed structures of BaTiO3 and SiO3 particles, with interstitial spaces partially filled with titania. Depending on the BaTiO3:silica ratio, the dielectric constant ranged from 5 to 55 and followed a 4-component logarithmic rule of mixing. This work demonstrates that the transfer process and the final material properties of MAPLE-DW oxide materials are largely decoupled.