Abstract
In this paper, three types of Al2O3 powders with different sizes (1.6μm, 0.7μm, and 0.3μm) were used in a LTCC system of Al2O3 and borosilicate glass (BSG). Al2O3 and BSG are selected on account of their coefficient of thermal expansion (CTE) similar to silicon, which can reduce thermal stress. It was found that the dielectric constant, ε, of substrates drops with the decrease of Al2O3 powder size. ε increases with the increase of Al2O3 content for the sample with 1.6 μm Al2O3 powder, but decreases with the increase of Al2O3 content for the samples with 0.7 μm and 0.3 μm Al2O3 powders. SEM observations revealed that more pores with low permittivity appeared for the samples with smaller Al2O3 powders, resulting in the drop of dielectric constant of the sample finally.
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