Abstract
Porous methyl silsesquioxane thin films with low dielectric constantare successfully synthesized by means of the sol-gel spin-coatingmethod. The precursor solutions are prepared by properly mixing thepolymer as a matrix with different contents of triacetyl-β-cyclodextrin(TABCD) as a porogen. The chemical structure, dielectric constants,optical constants and void fraction are investigated by theellipsometric porosimetry, Fourier transform infrared (FTIR)spectroscopy, and other methods. Influences of TABCD and methyltrimethoxysilane (MTMS) on the dielectric properties are discussed. Forthose samples with higher porogen loading, orientation and electronicpolarizations are lower in low and high frequency regions,respectively, because of a considerably smaller number of polarmolecules. The FTIR results suggest that high R value (molarratio of H2O to MTMS) is more advantageous for formation of cagestructures and the cage/network structural ratio increases with theincreasing R value.
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