Abstract
The frequency variable microwave microscope was developed to evaluate the dielectric permittivity distribution for dielectrics. The dielectric permittivity and dielectric loss for multi-layer ceramics capacitor were estimated from their microwave reflection intensities at the minimum intensity points. The two dimensional dielectric permittivity image for the cross section of multi - layer ceramic capacitor was obtained clearly. The spatial resolution was attained to be about 1μm experimentally. The measured frequency dependence of dielectric permittivity and dielectric loss for multi - layer ceramics capacitor were accordance with the low frequency dielectric spectra measured by a RF impedance analyzer.
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