Abstract
AbstractAccurate dielectric function values are essential for spectroscopic ellipsometry data analysis by traditional optical model‐based analysis techniques. In this paper, we show that B‐spline basis functions offer many advantages for param‐ eterizing dielectric functions. A Kramers–Kronig consistent B‐spline formulation, based on the standard B‐spline recursion relation, is derived. B‐spline representations of typical semiconductor and metal dielectric functions are also presented. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Physica Status Solidi A-applications and Materials Science
Paper Title
Journal
Date
