Abstract

An effective method for studying the relationship of dielectric functions and thickness in perovskite SrRuO3 (SRO) thin film was proposed by spectroscopic ellipsometry measurement. A wedge-shaped SRO film with various thickness was prepared on SrTiO3 substrate by pulse laser deposition, whose dielectric functions and thickness were obtained by using the Drude–Lorentz dispersive model. The acquired band gap is slightly enhanced with film thickness reducing due to the one-dimensional quantum confinement effect and the disorder effect. The proposed method is expected to be applied for dielectric modulation in perovskite photonic device.

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