Abstract
Pb0.4Sr0.6TiO3/LaNiO3 (PST/LNO) thin film with a perfect (100) orientation was deposited on SiO2/Si substrate by magnetron sputtering method. Both Pt and LNO top electrodes have been prepared on this film to investigate the electrical properties. The dielectric constant and piezoelectric coefficient significantly increase while the average coercive field is strongly lowered when LNO is used as the top electrode. A large tunability of 77% (@300kV/cm) and low loss factor of 2.85% were obtained. Also, a maximum and remnant piezoelectric coefficients (d33max.eff. and d33rem.eff.) values of 90pm/V and 47pm/V were observed. These measured properties indicate that the PST thin film is a multi-functional material, which is a promising candidate for piezoelectric applications and for tunability devices.
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