Abstract
ABSTRACTFerroelectric lead zirconate titanate (PZT) is the main industrial product in piezoelectric ceramic materials used for sensor and actuator applications. High precision in manufacturing of microelectromechanical systems is essential to get demanded performance accuracy. An adequate and preferably non-destructive measurement technique is desired to characterize the materials properties at various stages of device fabrication as well as to find correlation between the processing parameters, microstructure and functional properties. We report on a new pulsed technique, which has been employed to characterize all relevant properties of special machined array of PZT channels quickly, reliably and reproducibly: dielectric constant, loss factor tan σ, electromechanical coupling coefficient, resonance frequency and mechanical quality factor Q as well as temperature dependencies of these parameters.
Published Version
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