Abstract
SummaryDevelopment of turbomolecular pumps within the last three decadesOn the occasion of the 30th anniversary of the “Vakuum in Forschung und Praxis” in 2018, the author puts the turbomolecular pump at the centre of the historical overview. From the first experiments, which led to the development of this key component of modern vacuum generation in high and ultra‐high vacuum technology, to further developments up to the present day, individual technological advances made by Pfeiffer Vacuum – especially those of the last 30 years – are presented and future development trends are shown.
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