Abstract
Resume The grain size in vacuum-deposited thin films has been studied by means of non-destructive X-ray analysis. Convolutory techniques after Jones and Stokes were applied, as the intensity of reflections in thin films is so low as to prevent detection of lines of high order ( nh, nk, nl ) as is required by the Warren-Averbach theory. An Au thin film, about 3000 A thick, was examined and a grain size S of 150±30 A was obtained from the analysis of the {422}-line profile. The algorithms used during analysis of the step-by-step recordings takes the specific properties of thin films into account, and can be used with success in general determination of grain size in thin films evaporated under vacuum with different parameters of deposition.
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