Abstract
Arrayed ultrasonic microsensors have been fabricated using piezoelectric PZT (Pb(Zr,Ti)O 3) thin film on micromachined silicon diaphragm structures. Static deflection of the diaphragms strongly affects the sensitivity; upward-deflected diaphragms show much higher sensitivity than downward-deflected diaphragms. Array sensors have been fabricated using modified processes which enable the diaphragms on a chip to deflect upward, and sensitivity has been successfully improved 4–6 times compared to the downward diaphragms.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
