Abstract
In hot-filament CVD we synthesized single diamond crystals up to 100 μm in diameter [1]. In order to enhance growth rate and impede growth defects, it is intended to employ a new gas feeding system. This allows CH4 to be separately applied from H2 to the reactor locally at the substrate position. The effect of this concept on the gas phase was analyzed by Infrared Tuneable Diode Laser Absorption Spectroscopy (IR-TDLAS). The changes in species concentrations of CH4, CH3 and C2H2 with the substrate distance from filaments as well as first growth results are shown.
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