Abstract
We demonstrate that ion-beam lithography can be applied to the fabrication of rotationally parabolic refractive diamond X-ray micro-lenses that are of interest to the field of high-resolution X-ray focusing and microscopy. Three single half-lenses with curvature radii of 4.8 µm were produced and stacked to form a compound refractive lens, which provided diffraction-limited focusing of X-ray radiation at the P14 beamline of PETRA-III (DESY). As shown with SEM, the lenses are free of expressed low- and high-frequency shape modulations with a figure error of < 200 nm and surface roughness of 30 nm. Precise micro-manipulation and stacking of individual lenses are demonstrated, which opens up new opportunities for compact X-ray microscopy with nanometer resolution.
Highlights
The global trend towards the transition of modern accelerator X-ray sources to diffraction-limited synchrotrons (MAX IV, ESRF-EBS, PETRA-IV) and extremely brilliant Free Electron Lasers, provides great opportunities for coherent applications [1,2,3]
The optical performance of the CRL3 was tested at the EMBL P14 beamline at PETRA III, DESY (Hamburg, Germany)
We demonstrated that ion-beam lithography can be applied to micromachining of X-ray refractive lenses
Summary
The global trend towards the transition of modern accelerator X-ray sources to diffraction-limited synchrotrons (MAX IV, ESRF-EBS, PETRA-IV) and extremely brilliant Free Electron Lasers, provides great opportunities for coherent applications [1,2,3]. Beryllium parabolic lenses are the most common representatives of refractive optics, as beryllium has a low-attenuation coefficient combined with high refractive efficiency and well-developed manufacturing technology [6] All this makes beryllium lenses accessible for a wide spectrum of X-ray applications in the energy range from 3 to 60 keV [7]. Beryllium CRLs have been used for beam conditioning being condensers, collimators, beam-shapers and higherharmonics suppressors [8,9,10,11,12] They are successfully applied in coherent diffraction, imaging and Fourier techniques [13,14,15,16,17,18]. There is a high demand for alternative optical materials that could be appropriate for the manufacturing of speckle-free X-ray lenses
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