Abstract
Diamond layers are of special interest for x-ray mask fabrication because of their excellent optical and mechanical properties. Using a plasma activated chemical vapor deposition process, 2–5 μm thick diamond layers were deposited and characterized. Microhardness and Young’s modulus are found to be very close to the literature values of bulk diamond. A standard isotropic etching process was applied for membrane fabrication. The optical transparency and the thickness homogeneity were measured. Concerning surface roughness, scanning electron micrographs and atomic force measurements were evaluated. After irradiation of diamond masks with synchrotron light, a slight increase of optical transparency was found.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
