Abstract
Diamond-like carbon (DLC) coatings have been used as solid lubricating coatings in vacuum technology because of their good physical and chemical properties. In this paper, the hybrid technique of unbalanced magnetron sputtering and plasma immersion ion implantation (PIII) was adapted to fabricate diamond-like carbon-based functionally gradient N/TiN/Ti(N,C)/DLC film on the 304 stainless steel substrate. Atomic force microscopy (AFM) was used to analyze the topography and surface roughness of the gradient film. The mechanical properties were evaluated by nano-indentation. The results showed that this DLC gradient film had good qualities as a solid lubricating coating.
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