Diamond-like carbon films deposited without deposition particles of large incidence angles by sputtering

Abstract

Deposition of diamond-like carbon (DLC) films at liquid nitrogen temperature (77 K) under the control of the angular distribution of depositing particles was attempted using a DC facing target sputtering system. The film deposited at 77 K, the liquid-nitrogen temperature, has a much higher density and higher hardness than the film deposited at room temperature. Removal of the depositing particles having high incidence angles was found to be effective for increasing the hardness of the film.