Abstract
Abstract Previous measurements and analyses have pointed to either methyl CH 3 or acetylene C 2 H 2 as the primary growth species for diamond films grown from chemical vapor deposition. In this work we used a quartz microprobe and a mass spectrometer to measure how the concentration of C 2 H 2 varied with pressure and with the ratio of methane to hydrogen in the input gas. We compared these variation with variations in the growth rate, as measured with a microbalance. We found no consistent correlation between the growth rate and the C 2 H 2 concentration. This contrasts with a linear relationship that we found previously between the growth rate and the calculated concentration of the methyl radical CH 3 .
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