Abstract
Abstract Diamond crystals and polycrystalline diamond films have been synthesized in d.c. glow discharge plasma on an area of 100 cm 2 . A system of plasma electrodynamic rotation was used to increase the diamond synthesis area. Diamond crystal growth rate attained a value of 10 μm h −1 at a rotating frequency of 200 Hz, pressure=150 Torr and discharge power=4 kW. The dependence of diamond crystal nucleation density on synthesis temperature and methane concentration was also investigated. The maximum nucleation density was found at a temperature of 750°C.
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