Abstract
The chemical vapor deposition of diamond films on silicon and various other substrates from a methane/hydrogen mixture, as well as from other gas compositions, uses plasma, a hot filament, or an acetylene torch to generate the reactive species. Although the attempt to produce diamond films from polymers is not new, crystalline diamond structures have yet to be obtained; only diamond-like carbon has been reported. The technique described here features the excimer laser ablation of polymers and the formation of crystalline diamond. A Raman peak at 1,330 cm−1 clearly identifies diamond, but its shape also reveals the presence of graphite. Peaks at 1,350 −1 and 1,597 cm−1 identify glassy carbon. Scanning electron microscopy micrographs reveal the crystalline structure. Cubic blocks are formed, as well as grains of about 1 μ size showing facets of all kinds reported for diamonds.
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