Abstract

We have grown diamond films on films of cubic boron nitride (cBN). The cBN films were grown on Si(100) substrates using ion-assisted pulsed laser deposition. Fourier transform infrared (FTIR) spectroscopy indicated that the BN films contained ∼75% sp3-bonded cBN. The as-grown cBN films were inserted with no surface pretreatment (e.g., abrading or scratching) into a conventional hot filament diamond reactor. In situ Raman spectroscopy was used to confirm diamond synthesis during growth. The nucleation density of the diamond films was estimated at 1×109/cm2, equivalent to or higher than the best values for scratched silicon substrates. In addition, we found that the cBN films were etched in the diamond reactor; a film thickness ≳1500 Å was required to prevent total film loss before diamond nucleation occurred. The presence of cBN under the diamond was established using FTIR spectroscopy and Auger electron spectroscopy.

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