Abstract
A “morphologically engineered” fabrication approach has been utilized for the development various configurations of diamond/carbon field emitter arrays and devices. Based on this approach, we have developed several fabrication processes to micro-pattern diamond and other forms of carbon structures and achieve topologically managed field emitters that optimize both the geometrical and quantum aspects of the Fowler–Nordheim governed field emission. We report the fabrication of (a) pyramidal and edge-shaped vertical field emission devices, (b) lateral diamond field emission devices, (c) nano-patterned nano-scaled diamond field emitter arrays, and (d) gated carbon nanotubes field emitters. Excellent field emission device structures over a large area have been achieved with these fabrication methods. The interesting field emission results of these devices suggest the potential of diamond/carbon emission devices beyond conventional vacuum microelectronics is significant.
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