Abstract
Applications of plasma sources in technology, medicine and biomedicine are already known for a longer time. Our work is focused on diagnostics and applications of a microwave plasma source in these areas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at 2.45 GHz in the output power range (0 ÷ 300) W, which creates plasma from the working gas flowing through the quartz nozzle. We present results of diagnostics of generated plasma at nozzle exit at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double Langmuir probe measurement and optical emission spectroscopy.
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