Abstract

ABSTRACTThis paper presents the main results of an experimental study of the dependence of some important plasma parameters (plasma flux density, multicharge ion content, degree of ionization, energy distribution of the ions) on some laser parameters (light flux density, wavelength) for two laser types (TEA-CO2- and excimer laser). A special experimental method has been developed for an absolute and simultaneous measurement of the plasma parameters. The results obtained show the possibility to control the parameters of plasma fluxes over the deposition conditions and herewith to control the properties of the deposited films.

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