Abstract
A high pressure hydrogen microwave plasma for diamond film deposition has been experimentally studied. Spatial distributions of plasma parameters and electric field intensity inside the plasma reactor were investigated in detail to understand the mechanism of plasma ball formation under the discharge conditions; a filling pressure is typically 10–50 torr and an input microwave power is 1.3 kW. In order to study the spatial distributions of the high-energetic electrons, we carried out the measurements using the optical emission measurements with the periscope technique, together with the electron saturation current profile measurements with the electrostatic probe. Numerical analysis using the finite difference time domain (FDTD) method shows a fairly good agreement with the experimental results of the electric field distributions and power dissipation inside the plasma ball.
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