Abstract
We describe in this paper the measurement of light atom concentrations in plasmas and their detection in plasma-wall interaction experiments. VUV radiation or multiphoton techniques arerequired due to the large energy differences between the ground stateand the excited states. We discuss briefly commonly applied schemes ofnonlinear optics to generate narrow-bandwidth tunable VUV radiationwith particular emphasis on high-order stimulated anti-Stokes Ramanscattering in hydrogen gas. Applications of absorption andlaser-induced fluorescence spectroscopy both to discharges andexperiments with ion beams on targets are described. The discussion ofmultiphoton techniques focuses on the detection of sputtered atoms byresonantly enhanced multiphoton ionization (REMPI) and the detectionof O and H in radiofrequency excited plasma reactors. Methods ofabsolute calibration and limitations by collisional effects areconsidered in this context. Examples of the detection of atomichydrogen by light mixing are outlined in the conclusion.
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