Diagnostics of a high-pressure DC magnetron argon discharge with an aluminium cathode

Abstract

In this article, the plasma parameters of a direct current magnetron discharge in argon at moderate pressure (10 to 40 Pa) using an aluminium cathode are explored. The density of argon excited states, the sputtered aluminium atom density and the electron temperature are estimated using a collisional–radiative model. The electron temperature obtained using optical emission spectroscopic data agrees well with measurements taken using a Langmuir probe. The influence of the discharge parameters, namely the background argon pressure and the discharge current, are discussed.