Abstract

Each ion source consists of two principle parts: the plasma source and the extraction system. The characterization of the plasma source of a high current bucket ion source has been investigated. An optical plasma diagnostic method was used. In the following paper a description of the experimental method and the data analysis is given. The results and the limitation of the applied method are discussed.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call