Diagnostic of capacitively coupled radio frequency plasma by homogeneous discharge model

Abstract

In this Letter, a plasma diagnostic technique is reported to evaluate the plasma parameters of capacitively coupled radio frequency argon plasma on the basis of homogeneous discharge model. The technique is implemented for wide range of operating pressure ranging from few mTorrs to atmospheric pressure. Considerable dependence of plasma parameters on the plasma series resonance effect and the drift velocity of the electron for low pressure plasma and on the ion density for atmospheric pressure plasma jet were observed.