Abstract
Because of the high bulk resistivity of semi-insulating GaAs, surface or near-surface effects can change the apparent magnitudes of resistivity, mobility, and carrier concentration. We consider the following causes: (1) above-surface conduction, such as that due to impurities in a porous oxide; (2) subsurface conduction, due to sawing and polishing damage; (3) tunneling conduction in surface states; and (4) changes in near-surface conduction due to the modification of surface potential by surface states or absorbates. The most important of these effects appear to be subsurface damage and surface potential changes.
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