Abstract
Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 7. CFx Radical Creation and Destruction at Surfaces in Fluorocarbon Plasmas.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
