Abstract
Low-energy (0.1–10 keV) ion scattering (LEIS) can be used to analyze the atomic composition of the outermost layer of a surface. Possibilities for quantification and in-depth information are discussed. Using a new type of energy analyzer (EARISS) which enables the simultaneous detection of a large part of the energy spectrum, a greatly improved sensitivity is obtained. Even for a catalyst consisting of a highly dispersed carbon support (1000 m2/g) and a low loading of Pd/Pt clusters, the surface composition can be determined using a 2 keV Ne+ ion beam current of only 30 pA.
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