Abstract
A new superconducting 18 GHz electron cyclotron resonance ion source is being developed at the National Fusion Research Institute in South Korea. This source will be dedicated for future application of highly charged ions in the area of matter interaction, diagnostic imaging, and probing. In this paper, we describe the status of the source development consisting of a double electrode biased disk, sputtering systems for metal ion production, diagnostic ports for the extraction region, a variable gap extraction-Einzel lens system, and a low energy beam transport system.
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