Abstract
In this study, a monolithic optoelectronic integrated circuit (OEIC), in which a photodiode detector and a bipolar integrated circuit for reception and amplification are integrated on the same silicon substrate, is described. With the new process technology, the layout of optical and electronic devices is designed, and the processes of optical and electronic devices are run. Thus a good way of developing high performance, high reliability, cost effective optoelectronic integrated circuit has been found
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