Abstract
Micro/nano positioning is one of important techniques to operate bio-cell and micro assembly. For realizing the precise positioning, the various piezo-driven stages have been already proposed and micro/nano scale resolution has been achieved. However, it is pointed out that the existing precision positioning tools are too large compared to operating area. Their devices are too difficult to combine other devices and use in tight environment like under microscope. In this paper, a precise positioning method with wire connected mechanism under microscope is proposed. The proposed positioning system is simply composed actuators including piezoelectric element and super extra-fine wires. By applying wire connected mechanism, the saving of larger work environment compared to traditional devices is hoped.
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