Development of white and monochromatic X‐ray topography system in SAGA‐LS

Abstract

AbstractWe developed a compact synchrotron X‐ray topography system equipped with a demountable Si channel‐cut crystal monochromator with an energy range of 5–20 keV at beamline 09A in SAGA Light Source (SAGA‐LS) to enable switching between a white X‐ray beam and a monochromatic X‐ray beam. The position of incidence of the X‐ray beam on the sample is kept constant because the beam‐path difference, which is caused by inserting the monochromator and by tuning the X‐ray energy, is adjusted automatically. Two possible applications of this system are proposed: (1) the observation of dislocations in a thick Si rod by white X‐ray topography, and (2) a comparative study of X‐ray images of defects and strain in a 4H‐SiC wafer captured using white and monochromatic X‐ray beams.