Abstract
In this study, a vertical electrostatic comb-drive actuator with a novel cascade configuration called cascade vertical comb-drive actuator (CVCA) is developed to magnify the actuation stroke. The CVCA combines vertical comb-drive actuators and multi-stage structures to form a stacked actuation configuration that can be used to overcome the stroke constraint of the traditional vertical comb-drive actuator. To implement the CVCA, the Taiwan Semiconductor Manufacturing Company (TSMC) 0.35 µm two polysilicon layers and four metal layers (2p4m) complementary metal–oxide–semiconductor (CMOS) fabrication processes and post-CMOS micromachining steps are employed to fabricate the device. Due to the multilayer characteristic of the microstructure, the proposed CVCA can achieve the vertical motion and cascade structures. The experimental results indicated that the stroke of the proposed CVCA can be magnified three times as compared with that of the standard vertical comb drive with the same chip size.
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