Abstract
An ultra-precision lapping machine is developed, with precision turning technology to condition lapping plate in situ, pressurizating by cylinder pressure, and cooling frictional heat with inner cooling system, the lapping machine is used for ultra-precision lapping of brittle materials. The design concept and the structure of the key components of the utra-precision sngle-plane lpping mchine are discussed. After precision turning, the flatness of lapping plate is down to 0.002 mm/400 mm, and experimental results show that the flatness of circular grating glass has been greatly improved after ultra-precison lapping.
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