Development of ultra high resolution analytical electron microscope ISI-EM-002A

Abstract

Total design concept of EM-002A is to realize the following essential performance, that is, 1) attainment to ultimate high resolution as the conventional electron microscope, 2) complete compatibility of the high resolution mode and the analytical mode, 3) identification of the analyzed region and the observed image with atomic-level resolution, 4) observation of ultra fine structure of the biological specimen with maximum high contrast and so on.[Electron source] Accelerating voltage ranges from 20kV to 120kV in 6 steps Double Cockroft-Walton circuit is used as the high voltage generator and the high frequency ripple voltage is reduced to 0.1V. Electron gun assembly is composed of high voltage alumina insulator, whose shape is so well designed as to suppress micro-discharge to the negligible order.[Objective lens and specimen chamber] The objective lens is a strong symmetrical lens where the specimen chamber is located between the symmetrical upper and lower objective lens magnetic circuits. The objective lens has two powerful pole pieces, one being used for the ultra high resolution mode and the other for the standard mode.